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Yanzhi Scan four-probe square resistance meter Model: CHT-4500 RH

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The CHT-4500 RH is a scanning four-probe resistance tester designed for scientific research to perform rapid, automatic scans of a maximum 200mm sample (or 8-inch wafer) to obtain information on the square resistance / resistivity distribution at different positions of the sample. The probe head borrows from the mechanical clock movement manufacturing process, and uses the ruby bearing to guide the tungsten carbide probe to ensure high mechanical precision and long service life. Dynamic test repetition (close to the real scene) can reach 0.2%, which is the industry-leading level. The ultra-wide measurement range of 1 μΩ ~ 1 MΩ can cover most application scenarios, and can be widely used in photovoltaic, semiconductor, alloy, ceramics and many other fields.

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  • Product Features
  • Technical Parameters

1)The samples can be tested with 49,81,1 center, 10 center, 5 center radius, 5 center edge, 9 center radius edge, diameter scan; statistical analysis test data to generate 2D and 3D map;

2)Shielding test, completely eliminate the impact of light on the sample test, to ensure the accuracy of the measurement;
3)Vacuum adsorption prevents the influence of sample movement on the test during the fully automatic test process;
4)Integrated embedded design, touch the computer screen operation, finger dots can complete the operation.


The four-probe resistance tester is a triumph for engineering and physics but also for engineering and physics. The four-probe is a practical tool and has various applications in various industries. Four probes is suitable for semiconductor and solar cells (monocrystalline silicon, polysilicon, amorphous silicon, perovskite), liquid crystal panel (ITO / AZO), functional materials (thermoelectric materials, carbon nanotubes, graphene, nanowires, conductive fibers, composite materials), semiconductor process detection (metallization / ion injection / diffusion layer), amorphous alloy, shape memory alloy, semiconductor manufacturing and other industries.


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Four-probe meter is a commonly used measurement tool for measuring the resistivity of electronic materials (such as silicon (Si), germanium (Ge), gallium arsenide (GaAs) and other semiconductor materials and the resistivity value of thin films (thin layer) for electronic devices.


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The CHT-4500 RH is a scanning four-probe resistance tester designed for scientific research to perform rapid, automatic scans of a maximum 200mm sample (or 8-inch wafer) to obtain information on the square resistance / resistivity distribution at different positions of the sample. The probe head borrows from the mechanical clock movement manufacturing process, and uses the ruby bearing to guide the tungsten carbide probe to ensure high mechanical precision and long service life. Dynamic test repetition (close to the real scene) can reach 0.2%, which is the industry-leading level. The ultra-wide measurement range of 1 μΩ ~ 1 MΩ can cover most application scenarios, and can be widely used in photovoltaic, semiconductor, alloy, ceramics and many other fields. 

CHT-4500 RH type automatic four-probe testing system is a multi-purpose comprehensive automatic measuring equipment using the four-probe measurement principle. The equipment follows the national standard of monocrystalline silicon physical test method and refers to the American A.S.T. M standard, special equipment designed for testing the resistivity of semiconductor materials and block resistance (thin layer resistance). Through the automatic test system, the resistivity and block resistance distribution of the wafer are measured. After the contour graph is drawn, the distribution of the whole wafer is directly observed.

The CHT-4500 RH automatic test system applies the van der Burger measurement method to the linear four-probe by adopting the four-probe combination measurement technique. Using the combination transformation of current probe and voltage probe to make two electrical measurements, and the final calculation results can automatically eliminate the adverse effects on the measurement results caused by sample geometry size, boundary effect, probe inequality and mechanical drift. Therefore, during the test process, the probe spacing, the sample size and the position of the probe on the sample surface can not be considered under the basic conditions. This dynamic automatic correction of the above adverse factors significantly reduces its impact on the test results, thus improving the accuracy of the measurement results.

CHT-4500 RH automatic four probe software test system has a friendly operation test interface, through this test program to assist users to easily conduct the test operation, the collected test data for mathematical analysis, and then the test data in Excel table, 2D, 3D and other numerical charts intuitive record, display. It is convenient for users to conduct various data analysis on the data. Users can save or print the collected data in the computer for future reference and view.


Automatic four-probe software test system


全自动四探针软件测试系统


全自动四探针软件测试系统

Measuring range

Resistor: 10-5~105 Ω. cm;

Block resistance: 10-4~106 Ω /□.

Detectable wafer size

2 inches to 12 inches; (solar cell 210mm * 210mm)

Constant-current source

The current range is divided into six grades: 1 µ A, 10 µ A, 100 µ A, 1 mA, 10 mA and 100mA.

Sampling voltage range

Range: 000.00~199.99mV; (for low resistance expansion, range: 00.000~19.999mV)

Resolution: 10 μ V; (resolution: 1 μV)

Input impedance:> 1000 MΩ; precision: ±0.1%.

Basic index of four probe probe

Spacing: 1±0.01mm; insulation resistance between needles: 1000 MΩ; mechanical movement rate: 0.3%;

Probe: tungsten carbide or high-speed steel Ф 0.5mm; probe pressure: 5~16 Newton (total force).

Relative error of the simulated resistance measurements

0.01Ω、0.1Ω、1Ω、10Ω、 100Ω、 1000Ω、10000Ω≤0.2%

The maximum relative error of the whole machine measurement

(Test with silicon standard: 0.003-500 Ω.cm) ± 3% (23℃)

Repetitiveness

≤± 0.5%

Minimum edge distance

3mm

Automatic test of the point selection mode

49 points, 81 points, center 1 point, center 10 points, center radius 5 points, center edge 5 points, center;

Radius edge 9 points, diameter scan.

Test data processing

Test data were recorded in a Excel format file table and 2D, 3D map plots were generated. The user can be right;

The collected data were analyzed in Excel for further statistical analysis of various data.

Shield and adsorption tests

The Samples were tested for shielding and vacuum adsorption to completely eliminate light and sample movement during fully automated testing;

Impact on the sample testing, to ensure the accuracy of the measurement.

Outline dimension

580mm 475mm 450mm (deep width and height)

Standard use environment

Temperature: 23 ± 2℃; relative humidity: 65%; no high frequency interference

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