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Yanzhi Full-spectrum Ellipsometer Model: CHT-TP 01

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CHT-TP 01 is a high-performance dedicated spectral ellipsometer launched in the field of photovoltaic solar cell research and development and quality control, with a wavelength range covering ultraviolet and near-infrared visibility.

CHT-TP 01 strict quality spectral ellipsometry is based on the suede solar cell dedicated high sensitivity detection unit and spectral ellipsometry analysis software, Specifically for measuring and analyzing the layer parameters of multilayer nanthin films in the photovoltaic field (e. g., Thickness) and physical parameters (like, Refractive index n, extinction coefficient k), Typical samples include: single layer or multilayer nano-film samples on the wafer, PERC, TOPCON, heterojunction, XBC and other processes, single layer subtraction film (such as Al2O3, SiNx, SiO2, TiO2, etc.), bilayer subtraction membrane detection (such as, SiNx/SiO2, SiNx2/SiNx1, SiNx / Al2O3, etc.). It can also be used to measure the optical properties of bulk materials.

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  • Product Features
  • Technical Parameters

1) Advanced rotary compensator measurement technology: Delta measurement range 0-360°, no measurement dead Angle problem, can also eliminate the polarization elimination effect caused by the rough surface on the results;

2) High sensitivity measurement of coarse suede nano-thin film: advanced optical energy enhancement technology, detection technology with high signal-to-noise ratio and weak signal processing method with high signal-to-noise ratio, realize the high sensitivity detection of suede solar cell surface coating characterized by coarse surface scattering and very low reflectivity;

3) crystalline silicon solar cell back passivation multilayer film detection: specially designed for multilayer film detection, can meet the detection of double layer film in the field of crystalline silicon solar cells, such as (SiNx / SiO2, SiNx2 / SiNx1, SiNx / Al2O3, etc.);

4) Full spectrum measurement speed: 5-10 seconds for typical full spectrum measurement; rapid detection is less than 1 second;

5) Detection sensitivity of the order of atomic level: the measurement accuracy can reach 0.05nm; 

6) Multi-incidence Angle degree adjustment: multi-incidence Angle degree structure design enhances the flexibility of instrument measurement, especially suitable for the measurement occasions of complex samples; 

7) Video sample alignment: accurately complete the sample alignment, and convenient observation, and reduce the human error;

8) One-button instrument operation: For routine operation, the complex measurement, modeling, fitting and analysis process can be completed by just clicking a button with the mouse. The rich model library and material library also facilitate the advanced operation needs of users.


The principle of ellipse

After the polarized light wave is incident to the sample surface and interacts with the surface, the information in the light wave will change the polarization state before and after the reflection of the light wave. This change is represented by the elliptic Angle (, △). By establishing the layered physical model of the sample, the information of the sample, such as the optical constant of the bulk material, or the membrane thickness and optical constant of the nanothin film (e. g., refractive index n and extinction coefficient k).

11

testing procedure

22

Sample membrane layer structure

33

Sample membrane layer structure
General indicators
Spectral range

(U) 245-1000nm (350-1000nm base section)

(UI) 245 – 1700 nm

Structure of the incidence angle(M) Manual variable angle of incidence, 40° -90°, step distance of 5°, repetitive 0.02 °
Performance index
Measurement reproducibility*

For the 100 nm on the Si SiO2 When the membrane thick patch:

Membrane thickness and repeatability: 0.01 nm

Refractive index repeatability: 0.0005

Membrane thickness measurement accuracy

Membrane thickness measurement accuracy: ± 0.5nm
Time for a single measurementFull-spectral Ψ / Δ values were measured with a typical measurement time of 5-10s
Optical and mechanical components
Oval principle

PSCA Mode (P-starter, S-Sample, C-compensator, A-bias detector) 

Light Source: Wide spectral light source

Liter / InspectorHigh quality polarization prism, computer high precision control
Measuring the spotThe spot diameter was manually adjusted, and the light spot was 180um
Spectral resolution0.4nm
Wavelength data intervalNot greater than 0.5nm
Objective tableCompatible with 300mm ╳ 3000mm and below sizes of solar cell sample integrated sample table easily transform measurable single crystal or polycrystalline sample
Sample alignmentSelf-Collimation Telescope & Microscope for precision sample alignment (height and inclination) electronic video image alignment
ProberHigh-sensitive and low-noise spectral detector
ControllerIncluding circuit board, microcontroller unit, power supply, light source
ComputerHigh-quality computer, including the operating system
OutdeviceThe software interface supports the output and input spectral data
Software
Interface languageMultilingual, including Chinese / English, with default Chinese
authority management

Including administrator authority, operator authority, facilitate

Spectral measurement

● Automatically set the optical component azimuth angle

● Manually / automatically perform user-defined tasks

● Spectra are shown in standard energy or wavelength units

● Monitoring of the sample response, and the online Ψ and Δ representations

Measurement result output

● Elliptic angle Ψ, Δ and other related output forms

● The dielectric function

● Refractive index and extinction coefficient

● Multi-angle spectroscopic measurements, mapping, and fitting

● degree of polarization

● Select the wavelength and angle data clips without changing the raw data

● The merging function of merging different data in one file

Modeling, simulation and fitting

it can fit the multilayer structure (monolayer membrane, composite membrane, periodic alternating multilayer membrane), and get Ψ, Δ, etc.;

● Easy-to-use, user-scalable material database

● List of rich material optical constants

● Material dispersion model: including Cauchy, Sellmeier, Lorentz, Drude and so on

● The EMA effective medium approximation

● Each membrane layer can be regarded as a uniform membrane, interface, and rough surface synthesis data analysis:

● Multiple incidence angle measurement

● Fitting of various measurement methods (ellipse Ψ / Δ, transmission, reflection):

● Fast regression fitting operators for optical models and measured data

● At the same time, the measured data and the simulated data are displayed graphically

Result display● Display graphics

Advanced report function, output measuring and computing spectra, optical models and fitting parameters

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