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Yanzhi Step instrument

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The performance of perovskite solar cells is affected by the film quality and thickness. High-quality films improve the electron and hole transport efficiency, reduce energy loss and extend the carrier lifetime. Optimizing the preparation process, such as the use of low toxicity solvent and closed steam annealing, can improve the crystallization and uniformity of the film, and improve the photoelectric conversion efficiency (PCE).

CHT series step instrument is the first set of domestic step instrument independently developed by strict in China, which is mainly used for the measurement of microscopic morphology parameters such as step height, film layer thickness and surface roughness. It has high precision and high resolution, and has an integrated granite structure to ensure stable and reliable repetitive measurement. The measurement end provides a variety of optional radius of curvature of the tip with a diamond probe, and the force applied by the probe is automatically controlled by dedicated software. A standard color camera is used to image the sample and the needle tip at the same time, which can observe the sample area without distortion and quickly locate the characteristic area.

The CHT series step instrument uses the large stroke piezoelectric displacement table to touch the sample surface and the feedback loop to control the piezoelectric microstage to ensure constant pressure value; when the convex step, the piezoelectric microtable to lift the probe and the pit, the displacement of the piezoelectric microtable is the height of the step. The vertical resolution was 0.1nm, and the repeatability deviation was less than 0.5nm.

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  • Product Features
  • Technical Parameters

Stable repeatability

The granite gantry structure is matched with high-precision microforce sensor and microdynamic scanner to provide high measurement accuracy and repeatability: the extreme deviation of 301um standard samples is less than 10nm, and the accuracy is less than 0.5nm.


Diamond probe

Using the diamond probe, to provide different specifications, to meet the different needs of customers for the step instrument.


Sample zone was observed without distortion

The system is equipped with a camera to monitor the probe scanning status, and no distortion observation sample area.


Sample spatial pose regulation function

Equipped with precision XY displacement platform and 360° rotating platform, it can adjust the XYZ, Angle and other spatial attitude of the sample to improve the measurement accuracy and efficiency.


Semiconductor applications

1) The step height of the deposited film

2) Step height of the resist (soft film material)

3) Etching rate determination

4) Chemical mechanical polishing (corrosion, depression, bending)


Height measurement of the cover-titanium ore steps


盖钛矿台阶高度测量


半导体

Glass substrate and display applications

1) AMOLED

2) Step by step height measurement of LCD screen research and development

3) Touch-panel thin-film thickness measurement

4) Solar-coated thin-film measurement

Flexible electronic devices for thin-film applications

1) Organic photodetectors

2) Organic film printed on the film and glass

3) Touch screen copper trace line


Model

CHT-TJ06B

CHT-TJ8B

CHT-TJ12B

Sample

Single pieces (10mm thickness) can be customized

Wens size and travel trip

A 6-inch, 150-mm, unit

8-inch 200mm

12-inch, 300mm

Repeatability measurement deviation

0.5nm (30 repeat scans for a 1 σ 1um standard block)

Maximum measurement range

80um

Vertical resolution

The 0.05nm full range

Probe afterstrength range

0.5~50mg

Force control

constant

Sample rate

200Hz

Maximum scan length

100mm

Scanning direction

Left and right two-way

Scan resolution

10nm

Maximum number of acquisition points were scanned

Two million points

Scanning speed

5um/s -50um/s

Scan flatness

20nm/2mm

Mode of sample table movement

Horizontal (X / Y), rotation (RZ) manual control

Repeatability of the XY sample table


±5um

Z sample desk trip

10mm

Sample rotating table

Shi 360°

Shi 360°

Standard probe

Radius of curvature 2um angle 60° (standard standard)

Submicron probe

Radius of curvature 1um angle 60°

Software function

Steps, roughness, flatness, and warping measurements

Probe sensor

Ultra-low inertia, the LVDC sensor

Solutions

 IEC61215

IEC61730

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