Measurement

1) Non-contact measurement: to obtain the surface morphology information without damage;

2) High precision: roughness / contour information measurement accuracy of 1nm;

3) Fast measurement: fast focus, fast scanning, fast reconstruction processing;

4) Stability: good anti-vibration and anti-interference ability, to adapt to the complex working environment.

Analysis

1) Visualization of data: Provide intuitive data visualization display for direct observation of interference patterns and measurement results;

2) It also supports data export to common file formats to facilitate further data analysis;

3) Powerful data analysis function: through the image processing algorithm and advanced analysis software, users can conduct phase extraction, surface topology analysis;

4) Multiple analysis such as film thickness calculation, thus achieving more detailed test results and more comprehensive characterization.

Product superiority

1) Non-contact, fast and flexible, powerful opto-mechatronics integration detection system;

2) The equipment has the function of measuring contour size and roughness to characterizing the microscopic morphology;

3) The equipment has the automatic splicing function, which can quickly realize the splicing and suture measurement of a large area;

4) The equipment has integrated operation measurement and analysis software, set the configuration parameters in advance for measurement, the software automatically statistics the measurement data and provides the data report export function, can quickly realize the batch measurement function;

5) The equipment has the data processing function of four modules: position adjustment, correction, filtering and extraction;

6) The equipment has roughness analysis, geometric contour analysis, structural analysis, frequency analysis, functional analysis and other five analysis functions;

7) The device has auxiliary analysis functions such as one-click analysis and multi-file analysis, which can realize the rapid analysis function of batch data files.

Industry applications

1）Application of suede pyramid measurement

The 3D-dimensional, 2D structure of the I surface;

Height and width measurements of individual pyramids;

Pyramid counting function: it can automatically count the number of grains per unit area, And mark the grain position with a cross symbol on the view, Quantity layout diagram of the pyramids of different specifications.

2）Grid line measurement

I grid line height and width measurement function:

Number of profile lines in a single field of view;

Grid line area automatic division function;

Grid line automatic measurement function.

3）integrated circuit wafer back thinning roughness

4）perovskite thin film solar energy technology laser tank measurement step height measurement